Franklin: Record - Introduction to microfabrication [electronic resource] / Sami Franssila.

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Introduction to microfabrication [electronic resource] / Sami Franssila.

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Author/Creator:
Franssila, Sami.
Edition:
2nd ed.
Publication:
Chichester, West Sussex, England ; Hoboken, NJ : John Wiley & Sons, 2010.
Format/Description:
Book
1 online resource (xiv, 518 p.) : ill.
Subjects:
Microelectromechanical systems.
Electronic apparatus and appliances.
Microfabrication.
Contents:
Front Matter
Introduction
Micrometrology and Materials Characterization
Simulation of Microfabrication Processes
Silicon
Thin-Film Materials and Processes
Epitaxy
Advanced Thin Films
Pattern Generation
Optical Lithography
Advanced Lithography
Etching
Wafer Cleaning and Surface Preparation
Thermal Oxidation
Diffusion
Ion Implantation
CMP: Chemical₆Mechanical Polishing
Bonding
Polymer Microprocessing
Glass Microprocessing
Anisotropic Wet Etching
Deep Reactive Ion Etching
Wafer Engineering
Special Processes and Materials
Serial Microprocessing
Process Integration
MOS Transistor Fabrication
Bipolar Transistors
Multilevel Metallization
Surface Micromachining
MEMS Process Integration
Process Equipment
Equipment for Hot Processes
Vacuum and Plasmas
CVD and Epitaxy Equipment
Cleanrooms
Yield and Reliability
Economics of Microfabrication
Moore's Law and Scaling Trends
Microfabrication at Large
Appendix A: Properties of Silicon
Appendix B: Constants and Conversion Factors
Appendix C: Oxide and Nitride Thickness by Color
Index.
Notes:
Includes bibliographical references and index.
Electronic reproduction. Hoboken, N.J. Available via World Wide Web.
Description based on print version record.
Local notes:
Acquired for the Penn Libraries with assistance from the Class of 1953 Fund.
Contributor:
Wiley InterScience (Online service)
Class of 1953 Fund.
Other format:
Print version: Franssila, Sami. Introduction to microfabrication.
ISBN:
10.1002/9781119990413
9781119990413 (electronic bk.)
1119990416 (electronic bk.)
9780470666722 (electronic bk.)
0470666722 (electronic bk.)
9780470749838 (cloth)
0470749830 (cloth)
Publisher no.:
99943881685
Web link:
The Class of 1953 Fund Home Page
The Class of 1953 Fund Home Page  Bookplate